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Bessel beam based optical profilometry

: Belyi, V.; Kroening, M.; Kazak, N.; Khilo, N.; Mashchenko, A.; Ropot, P.


Chatard, J.-P. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Detectors and Associated Signal Processing II
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5964)
ISBN: 0-8194-5982-8
Art. 59640L
Conference on Optical Systems Design <2005, Jena, Germany>
Conference Paper
Fraunhofer IZFP ()

We present our results of the development of some schemes for nondestructive optical profilometry of cylindrically shaped surfaces by using spatially matched conical light beams. A theoretical model is elaborated which describes profilometers with Bessel beams. A special feature of the profilometers proposed is the possibility to control their sensitivity and resolution. To this end, a scheme of tuning the cone angle of the Bessel beam over a wide range is incorporated. The operation regime of the profilometers is characterized by a nonzero spatial frequency of output signal. It allow us to apply a new algorithm for the interpretation of the output signal. This algorithm consists in the calculation of the azimuth spectrum which characterizes the deviation of tested profiles from the circular ones.