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Bessel beam based optical profilometry

 
: Belyi, V.; Kroening, M.; Kazak, N.; Khilo, N.; Mashchenko, A.; Ropot, P.

:

Chatard, J.-P. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Detectors and Associated Signal Processing II
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5964)
ISBN: 0-8194-5982-8
Art. 59640L
Conference on Optical Systems Design <2005, Jena, Germany>
English
Conference Paper
Fraunhofer IZFP ()

Abstract
We present our results of the development of some schemes for nondestructive optical profilometry of cylindrically shaped surfaces by using spatially matched conical light beams. A theoretical model is elaborated which describes profilometers with Bessel beams. A special feature of the profilometers proposed is the possibility to control their sensitivity and resolution. To this end, a scheme of tuning the cone angle of the Bessel beam over a wide range is incorporated. The operation regime of the profilometers is characterized by a nonzero spatial frequency of output signal. It allow us to apply a new algorithm for the interpretation of the output signal. This algorithm consists in the calculation of the azimuth spectrum which characterizes the deviation of tested profiles from the circular ones.

: http://publica.fraunhofer.de/documents/N-263016.html