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Electrically controlled metal oxide gas sensor designed with PROSA-CHEM

: Scheinert, M.; Doll, T.; Wöllenstein, J.; Dalin, J.; Frerichs, H.P.; Verhoeven, H.; Lehmann, M.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2002. Proceedings. Vol.1 : First IEEE International Conference on Sensors, June 12 - 14, 2002, Hyatt Orlando, Orlando, Florida, U.S.A.
Piscataway, NJ: IEEE Operations Center, 2002
ISBN: 0-7803-7454-1
International Conference on Sensors <1, 2002, Orlando/Fla.>
Conference Paper
Fraunhofer IPM ()

In this paper, an electrically controlled metal oxide gas sensor designed with PROSA-CHEM is introduced, specified and realized. The simulator PROSA-CHEM is explained and its function is verified by using realistic sensor data. On the practical side, a first device was fabricated and first measurements were done and compared with the simulation. It is found that the gas sensitivity and selectivity of the sensor can be altered by electric fields.