Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Chuck system for integrated IR-based temperature - measurement in rotational grinding of sapphire wafers

 
: Klocke, F.; Dambon, O.; Herben, M.; Veselovac, D.; Adams, O.; Kuljanic, E.; Sortino, M.; Totis, G.

Shore, P. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
12th International Conference of the European Society for Precision Engineering and Nanotechnology 2012. Proceedings. Vol.1 : June 4th - 8th 2012, Stockholm, Sweden
Bedford: Euspen, 2012
ISBN: 978-0-9566790-0-0
pp.332-335
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) <12, 2012, Stockholm>
English
Conference Paper
Fraunhofer IPT ()

: http://publica.fraunhofer.de/documents/N-259492.html