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Fabrication of an array-like freeform molding tool for UV-replication using a step and repeat process

: Dunkel, Jens; Wippermann, Frank; Brückner, Andreas; Reimann, Andreas; Bräuer, Andreas


Schmid, U. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Smart sensors, actuators and MEMS VI. Vol.2 : 24 - 26 April 2013, Grenoble, France
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8763)
ISBN: 978-0-8194-9560-0
Paper 876330
Conference "Smart Sensors, Actuators and MEMS" <6, 2013, Grenoble>
Conference Paper
Fraunhofer IOF ()
artificial compound eye camera; wafer level optics; micro optics; imaging

Artificial compound eye cameras are a prominent approach of next generation wafer level cameras for consumer electronics due to their lower z-height compared to conventional single aperture objectives. In order to address low cost and high volume markets, their fabrication is based on a wafer level UV-replication process. The image quality of compound eye cameras can be increased significantly by the use of refractive freeform arrays (RFFA) instead of conventional microlens arrays. Therefore, we present the fabrication of a RFFA wafer level molding tool by a step and repeat process for the first time. The surface qualities of the fabricated structures were characterized with a white light interferometer.