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Production of MF and DC-pulse sputtered precision optical interference coatings using a large area in-line coater

: Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.

Puetz, J. ; Leibniz-Institut für Neue Materialien gGmbH -INM-, Saarbrücken:
Advanced coatings on glass & plastics for large-area or high-volume products : Proceedings of the 5th International Conference on Coatings on Glass, ICCG 5, July 4 - 8, 2004, Congress Hall, Saarbruecken, Germany
Saarbrücken: INM, 2004
International Conference on Coatings on Glass (ICCG) <5, 2004, Saarbrücken>
Conference Paper
Fraunhofer IST ()
optical coating; sputtering

This work focuses on the problem of producing antistatic and antireflective coatings (ARAS) based on TiO2-SiO2 layer stacks and single ITO layer with an in-line sputter system. The main problem observed using a Leybold A700V with PK750 cathodes for the deposition on 30 x 30 cm2 substrates was the insufficient reproducibility. In order to overcome these problems, we study the production of single and multilayer systems under different conditions and their changing material propterties.
The determination of optical constance and independent layer thickness with variable angle spectroscopic ellipsometry (VASE) and photometry will be discussed. Also XRR measurements were carried out. With this information, a redesign of stacks necessary due to thickness deviations of the already deposited layers can be performed. Approaches to minimize the drawbacks of depositing optical coatings in in-line systems are shown.