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Photocatalytic properties of doped TiO2 and of Ti-based mixed oxide thin films prepared by reactive pulse magnetron sputtering

Photokatalytische Eigenschaften des dotierten TiO2 und der auf Ti-basierenden Mischoxidschichten, erzeugt durch reaktive Impulsmagnetronzerstäubung
: Vergöhl, M.; Frach, P.; Neumann, F.; Hunsche, B.; Glöß, D.

Puetz, J. ; Leibniz-Institut für Neue Materialien gGmbH -INM-, Saarbrücken:
Advanced coatings on glass & plastics for large-area or high-volume products : Proceedings of the 5th International Conference on Coatings on Glass, ICCG 5, July 4 - 8, 2004, Congress Hall, Saarbruecken, Germany
Saarbrücken: INM, 2004
International Conference on Coatings on Glass (ICCG) <5, 2004, Saarbrücken>
Conference Paper
Fraunhofer IST ()
Fraunhofer FEP ()
photocatalysis; doped TiO2; mixed oxide; pulse magnetron sputtering; optical thin films; reaktive Magnetronzerstäubung

Photo-induced hydrophilicity and photocatalytic decomposition of organic matter are well known properties of the crystalline TiO2 phases. Because of the wide band gap (3.2 eV for anatase and 3.0 eV for rutile) UV illumination is necessary for these processes. However, activation by visible light would be desireable for many applications. By doping the semi-conducting TiO2 or utilising mixed oxides it is possible to shift the absorbtion edge and thus the activation wavelength into the visible range of light. Nitrogen doped TiO2 thin film as well as Ti-based mixed oxides (TixMeyOz) were deposited on glass using mid-frequency reactive pulse magnetron sputtering. The photo-induced hydrophilicity and the photocalytic decomposition by UV and visible illumination were investigated by measuring the decrease of the water contact angle and the decomposition of organic matter, respectively.