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DBD plasma treatment of titanium in O2, N2 and air

: Dahle, S.; Gustus, R.; Viöl, W.; Maus-Friedrichs, W.


Plasma chemistry and plasma processing 32 (2012), No.5, pp.1109-1125
ISSN: 0272-4324
ISSN: 1572-8986
Journal Article
Fraunhofer IST ()

Dielectric Barrier Discharge plasma treatment of a titanium metal foil in oxygen, nitrogen and air under atmospheric conditions is investigated employing X-Ray Photoelectron Spectroscopy (XPS). We investigated three different reference samples and compare the results with a large number of studies on the XPS analysis of titanium compounds containing oxygen and nitrogen. The plasma treatment in all three different process gases leads to the formation of titanium dioxide films, while rather small nitrogen fractions are found after nitrogen and air plasma treatments. This finding is explained basing on plasma chemistry insight from the literature.