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Nano-diamond vacuum MEMS for RF applications

 
: Heidrich, N.; Hees, J.; Zürbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O.; Lebedev, V.

Institute of Electrical and Electronics Engineers -IEEE-:
Transducers 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems : Eurosensors XXVII; Barcelona, Catalonia (Spain); 16 - 20 June 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-5981-8
ISBN: 978-1-4673-5983-2
pp.218-221
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <17, 2013, Barcelona>
European Conference on Solid-State Transducers (Eurosensors) <27, 2013, Barcelona>
English
Conference Paper
Fraunhofer IAF ()
nanodiamond; MEMS; field emission

Abstract
This work considers the challenges and technical solutions concerning the deposition of thin films and processing of emerging vacuum microelectromechanical systems (MEMS) based on nanodiamond flexural beams. It is demonstrated that the add-on processing of MEMS chips allows for fabrication of functional nano-features such as nanoscale anode-cathode spacing in order to realize low-bias field emission. Emission current densities up to 500 nA per nanodiamond tip were achieved at an applied bias of 30 V.

: http://publica.fraunhofer.de/documents/N-255130.html