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Nano-diamond vacuum MEMS for RF applications

: Heidrich, N.; Hees, J.; Zürbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O.; Lebedev, V.

Institute of Electrical and Electronics Engineers -IEEE-:
Transducers 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems : Eurosensors XXVII; Barcelona, Catalonia (Spain); 16 - 20 June 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-5981-8
ISBN: 978-1-4673-5983-2
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <17, 2013, Barcelona>
European Conference on Solid-State Transducers (Eurosensors) <27, 2013, Barcelona>
Conference Paper
Fraunhofer IAF ()
nanodiamond; MEMS; field emission

This work considers the challenges and technical solutions concerning the deposition of thin films and processing of emerging vacuum microelectromechanical systems (MEMS) based on nanodiamond flexural beams. It is demonstrated that the add-on processing of MEMS chips allows for fabrication of functional nano-features such as nanoscale anode-cathode spacing in order to realize low-bias field emission. Emission current densities up to 500 nA per nanodiamond tip were achieved at an applied bias of 30 V.