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Simulation of FIB-SEM images for analysis of porous microstructures

 
: Prill, T.; Schladitz, K.

:

Scanning 35 (2013), No.3, pp.189-195
ISSN: 0161-0457
ISSN: 1932-8745
English
Journal Article
Fraunhofer ITWM ()

Abstract
Focused ion beam nanotomography-scanning electron microscopy tomography yields high-quality three-dimensional images of materials microstructures at the nanometer scale combining serial sectioning using a focused ion beam with SEM. However, FIB-SEM tomography of highly porous media leads to shine-through artifacts preventing automatic segmentation of the solid component. We simulate the SEM process in order to generate synthetic FIB-SEM image data for developing and validating segmentation methods. Monte-Carlo techniques yield accurate results, but are too slow for the simulation of FIB-SEM tomography requiring hundreds of SEM images for one dataset alone. Nevertheless, a quasi-analytic description of the specimen and various acceleration techniques, including a track compression algorithm and an acceleration for the simulation of secondary electrons, cut down the computing time by orders of magnitude, allowing for the first time to simulate FIB-SEM tomography.

: http://publica.fraunhofer.de/documents/N-254917.html