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2013
Journal Article
Titel
Polymer embedded silicon nitride thermally tunable Bragg grating filters
Abstract
Optical waveguides have been fabricated and investigated that employ silicon nitride as core and polymer as surrounding cladding material. Buried single-mode waveguides showed a propagation loss of 0.7 dB/cm at 1550 nm. Depending on the thickness of the silicon nitride core, the optical mode can be designed to expand largely into the polymer cladding. Using such a low-confinement structure and a metal strip heater embedded in the polymer cladding material beneath the core region, efficient thermally tunable waveguide Bragg grating filters were demonstrated. Wavelength tuning >57 nm was achieved at 220 mW of electrical heating power.