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Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification

: Gu-Stoppel, S.; Janes, J.; Kaden, D.; Quenzer, H.J.; Hofmann, U.; Benecke, W.


Maher, M.A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining and microfabrication process technology XVIII : 5 and 7 February 2013, San Francisco, California, United States
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8612)
ISBN: 978-0-8194-9381-1
Paper 86120I
Conference "Micromachining and Microfabrication Process Technology" <18, 2013, San Francisco/Calif.>
Conference Paper
Fraunhofer ISIT ()

This paper presents design, fabrication and measurements for single-axis piezoelectric MEMS micromirrors with 1 mm2 apertures. These micromirrors, which feature thin-film PZT actuators and mechanical leverage amplification, are dedicated for laser projection and meet the requirements of high resonant frequency and large deflection angles. To identify the optimal micromirror geometries a parametric study by means of FEM simulations and analytic modeling has been performed. Characterization, related to the material qualities of PZT and the mechanical performance of the micromirrors, have verified the reliability of the process, the robustness and the performance of the fabricated prototypes. According to the measurements the fabricated micromirrors feature high Q-factor about 1570. The micromirror reaches the theta(ind opt)·D product of 42.5 °·mm at 32 kHz driven by a low voltage of 7 V. Furthermore, new designs with larger apertures and deflections are currently being developed.