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Setup for measuring the resonance characteristics of high-frequency microtransducers

Ukad do pomiaru charakterystyk rezonansowych mikroprzetworników wysokocze{ogonek}stotliwociowych
: Maozie, G.; Nieradka, K.; Kopiec, D.; Ritz, Y.; Zschech, E.; Gotszalk, T.

Przeglad elektrotechniczny = Electrical review 88 (2012), No.10B, pp.64-66
ISSN: 0033-2097
English, Polish
Journal Article
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()

In this paper we describe a system for measuring the resonance characteristics of the silicon cantilever. The method of preparation spring cantilevers is presented. The construction of a specialized optical system to detect the deflection of the cantilevers and the principle of detection the cantilevers deflection is described. The new method based on the modulated laser beam, to measure characteristics of the high frequency transducers, is presented.