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Transparent diamond electrodes for tunable micro-optical devices

: Zürbig, V.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Nebel, C.E.; Ambacher, O.; Lebedev, V.


Diamond and Related Materials 38 (2013), pp.101-103
ISSN: 0925-9635
Journal Article
Fraunhofer IAF ()
aluminum nitride; p-type doping; microlens; Laser Doppler vibrometry; hall-effect; nanocrystalline diamond

Boron-doped nanocrystalline diamond (NCD:B) elastic layers combined with aluminum nitride (AlN) piezoactuators are well suitable for ultrathin, highly transparent and mechanically stable micro-optical devices operating at high frequencies. In such unimorph structures NCD:B layers serve as advanced transparent electrodes instead of commonly used indium tin oxide. The carrier transport properties of heavily p-doped NCD thin films are characterized by temperature-dependent voltage-current and Hall measurements. In addition, the piezo-driven aspheric deformation of NCD:B/AlN micro lenses is demonstrated by means of integrated multi-sector actuators.