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Qualification of glass-ceramics (LTCC) for optical and opto-electronic applications

 
: Buß, W.; Schreiber, P.; Brode, W.; Heymel, A.; Müller, E.; Barnitzek, T.; Seifert, D.; Völger, K.W.

AMA Service GmbH, Wunstorf:
OPTO 2004, 6th International Conference for Optical Technologies, Optical Sensors and Measuring Techniques and IRS2 2004, 8th International Conference for Infrared Sensors and Systems. Proceedings : In connection with O.M.P. - Opto Micro Products, International Trade Fair for Optical and Microtechnology Products with conferences, 25 - 27 May 2004, Nuremberg Exhibition Centre, Germany
Wunstorf: AMA Service GmbH, 2004
pp.119-122
International Conference for Optical Technologies, Optical Sensors and Measuring Techniques (OPTO) <6, 2004, Nürnberg>
International Conference for Infrared Sensors and Systems (IRS2) <8, 2004, Nürnberg>
International Trade Fair for Optical and Microtechnology Products (OMP) <2004, Nürnberg>
English
Conference Paper
Fraunhofer IOF ()
glass-ceramic; optical reflector; embossing; embossing tool; illumination modul

Abstract
The modification potential for low temperature co-fired ceramics (LTCC) and the processes by which they are manufactured were tested with the aim of incorporating modern glass-ceramic materials as optical elements for reflection or for defined forward scattering. A new green-foil was developed with grain size down to 6 00 nm - 700nm for better moulding optical-flat surfaces. The compatibility of additional technological steps for cold embossing as well as punching the green-foil stacks with regard to the traditional thick-film metalization and sintering processes was proven. A surface roughness better than 200nm rms has been achieved without additional smoothing steps.

: http://publica.fraunhofer.de/documents/N-25117.html