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Diamond turning of cylindrical structures for microoptics

: Gebhardt, A.; Steinkopf, R.

European Society for Precision Engineering and Nanotechnology -EUSPEN-:
4th EUSPEN International Conference 2004. Proceedings : May 31st - June 2nd, 2004, Glasgow, Scotland, UK
Scotland, UK, 2004
ISBN: 1-86194-108-0
European Society for Precision Engineering and Nanotechnology (International Conference) <4, 2004, Glasgow>
Conference Paper
Fraunhofer IOF ()
cylindrical optic; beam shaping; beam homogenization; cylindrical structure

Cylindrical optics (lens arrays, mirrors) are typically used for beam shaping, beam homogenization as well as for live generation. Often aspherical profiles with high geometrical accuracy and pitches > 100 pm are required. This structures are machinable with diamond turning with a high flexibility. The cylindrical structures can be cut into the face or into the circumference of the workpiece. The bending of the structures - perpendicular to the cylinder profile - can be minimized by a great off-axis distance or is corrigible by a suitable optical design. In this paper the turning technologies are described considering as two examples: First, a replication tool (OHFC-Copper) for a cylindrical lens array with hyperbolic profile for an optical microphone and Second, a cylindrical mirror with asymmetric profile in OHFC-Copper. The achieved form accuracy and surface roughness are documented. The technological limits regarding minimum dimensions are discussed.