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Diamond turning of cylindrical structures for microoptics

 
: Gebhardt, A.; Steinkopf, R.

European Society for Precision Engineering and Nanotechnology -EUSPEN-:
4th EUSPEN International Conference 2004. Proceedings : May 31st - June 2nd, 2004, Glasgow, Scotland, UK
Scotland, UK, 2004
ISBN: 1-86194-108-0
pp.197-198
European Society for Precision Engineering and Nanotechnology (International Conference) <4, 2004, Glasgow>
English
Conference Paper
Fraunhofer IOF ()
cylindrical optic; beam shaping; beam homogenization; cylindrical structure

Abstract
Cylindrical optics (lens arrays, mirrors) are typically used for beam shaping, beam homogenization as well as for live generation. Often aspherical profiles with high geometrical accuracy and pitches > 100 pm are required. This structures are machinable with diamond turning with a high flexibility. The cylindrical structures can be cut into the face or into the circumference of the workpiece. The bending of the structures - perpendicular to the cylinder profile - can be minimized by a great off-axis distance or is corrigible by a suitable optical design. In this paper the turning technologies are described considering as two examples: First, a replication tool (OHFC-Copper) for a cylindrical lens array with hyperbolic profile for an optical microphone and Second, a cylindrical mirror with asymmetric profile in OHFC-Copper. The achieved form accuracy and surface roughness are documented. The technological limits regarding minimum dimensions are discussed.

: http://publica.fraunhofer.de/documents/N-25048.html