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2004
Conference Paper
Titel
Diamond turning of cylindrical structures for microoptics
Abstract
Cylindrical optics (lens arrays, mirrors) are typically used for beam shaping, beam homogenization as well as for live generation. Often aspherical profiles with high geometrical accuracy and pitches > 100 pm are required. This structures are machinable with diamond turning with a high flexibility. The cylindrical structures can be cut into the face or into the circumference of the workpiece. The bending of the structures - perpendicular to the cylinder profile - can be minimized by a great off-axis distance or is corrigible by a suitable optical design. In this paper the turning technologies are described considering as two examples: First, a replication tool (OHFC-Copper) for a cylindrical lens array with hyperbolic profile for an optical microphone and Second, a cylindrical mirror with asymmetric profile in OHFC-Copper. The achieved form accuracy and surface roughness are documented. The technological limits regarding minimum dimensions are discussed.