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Vertical Integration techniques for MEMS using HAR TSV
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2013
Conference Paper
Titel
Vertical Integration techniques for MEMS using HAR TSV
Author(s)
Hofmann, Lutz
Schubert, I.
Ecke, Ramona
Gottfried, Knut
Schulz, Stefan E.
Geßner, Thomas
Hauptwerk
Smart Systems Integration 2013. CD-ROM
Konferenz
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS