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Compact light scatter techniques for optical coatings

: Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Paper ThD.9
Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler>
Conference Paper
Fraunhofer IOF ()

For compact yet comprehensive and flexible characterization of thin film components a one shot 3D light scatter sensor as well as a highly sensitive multi wavelength table top scatterometer with spherical detection capability have been developed.