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| Weck, M. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-; Fraunhofer-Institut für Produktionstechnologie -IPT-, Aachen; Physikalisch-Technische Bundesanstalt -PTB-, Braunschweig:
EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment 2003. Proceedings. Vol.2 : May 19th - 20th, 2003, Aachen, Germany
Voerde: Riehm, 2003
ISBN: 3-926832-30-4
pp.363-366 |
| International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment <2003, Aachen> |
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| English |
| Conference Paper |
| Fraunhofer IWU () |