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Waferscale nanophotonic circuits made from diamond-on-insulator substrates

: Rath, P.; Gruhler, N.; Khasminskaya, S.; Nebel, C.E.; Wild, C.; Pernice, W.H.P.

Postprint (PDF; )

Optics Express 21 (2013), No.9, pp.11031-11036
ISSN: 1094-4087
Journal Article, Electronic Publication
Fraunhofer IAF ()

Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5dB/mm is also confirmed by measuring transmission through long waveguides.