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A flexible micro-electrode array with an embedded flexible CMOS-chip for medical applications

 
: Winkin, N.; Gierth, U.; Michaelis, A.; Mokwa, W.

Gessner, Thomas (Ed.) ; Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2013. CD-ROM : Amsterdam, The Netherlands, 13 - 14 March 2013, 7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Berlin: VDE-Verlag, 2013
ISBN: 978-3-8007-3490-0
8 pp.
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <7, 2013, Amsterdam>
English
Conference Paper
Fraunhofer IKTS ()

Abstract
Micro-electrodes and micro-electrode arrays are essential in a variety of medical applications like deep brain stimulators, cochlear implants or retinal implants. To have a close interface to the human tissue for stimulating neurons or recording action potentials, these micro-electrode arrays must be flexible and should have a large area and a large number of electrodes. In order to electrically connect such large electrode numbers in implantable devices with integrated electronics, simple wiring is no longer possible. In fact to reduce the number of conductor paths, electrodes have to be connected via a bus system. Therefore it is necessary to bring CMOS circuitry in close proximity to the stimulation electrodes, by this forming an "intelligent electrode". To keep the system flexible th e silicon chips have to be thinned. In this paper the design and fabrication steps of such a flexible intelligent implantable MEAsystem and results on mechanical and electrical properties are presented. Furthermore, alternatively coating of the electrodes with carbon nanotubes by electrophoresis has been investigated and will be presented.

: http://publica.fraunhofer.de/documents/N-246935.html