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  4. Highly efficient broadband blazed grating in resonance domain
 
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2013
Journal Article
Title

Highly efficient broadband blazed grating in resonance domain

Abstract
A resonance domain blazed grating, composed of an effective medium structure and a subsequent mode conversion layer, is designed, fabricated, and characterized. Due to the demanding high aspect ratio geometries, a technological approach for multilevel structures, assisted by atomic layer deposition technology, has been developed. The measured efficiency of about 90% exhibits the largest value yet reported for a multi-level fused silica transmission grating in the resonance domain, operating at non Littrow mounting, close to normal incidence.
Author(s)
Oliva, Maria
Michaelis, Dirk  
Fuchs, Frank
Tünnermann, Andreas  
Zeitner, Uwe Detlef  
Journal
Applied Physics Letters  
DOI
10.1063/1.4807764
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • atomic layer deposition

  • diffraction gratings

  • light transmission

  • optical design techniques

  • optical fabrication

  • silicon compounds

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