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Uniformity analysis and design optimization of multi-layer thin film filter used in fiber optics communication system

: Yang, M.; Liu, J.; Chen, Q.; Zhang, B.


Amra, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in optical thin films : 30 September - 3 October 2003, St. Etienne, France
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5250)
ISBN: 0-8194-5134-7
Conference "Advances in Optical Thin Films" <2003, St. Etienne>
Conference Paper
Fraunhofer IOF ()
optical thin films; thickness uniformity; robust design

Thin film filters used in fibre optics communications are strictly defined, which requires a totally uniform thickness distribution over the coated substrate. In this paper we firstly analyse the thickness distribution related to chamber geometry and source emission function. Chamber layout and source function are optimised for large area uniformity.