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LTCC-based sensors for mechanical quantities

: Partsch, U.; Lenz, C.; Ziesche, S.; Lohrberg, C.; Neubert, H.; Maeder, T.

Informacije MIDEM 42 (2012), No.4, pp.260-271
ISSN: 0352-9045
Journal Article
Fraunhofer IKTS ()
3D-Integration; LTCC; sensor

Besides their excellent dielectric and thermo-mechanical characteristics Low Temperature Cofiring Ceramics (LTCC) are also well suited for the fabrication of 3D micromechanical components such as sensors for mechanical quantities. This paper describes the development of such sensors covering some material and technological aspects. Furthermore, the design process for mechanical sensors is discussed as well as application examples of sensors for the detection of pressure, force, acceleration and flow.