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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells

 
: Moldovan, A.; Birmann, K.; Rentsch, J.; Zimmer, M.; Gitte, T.; Fittkau, J.

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Mertens, P. ; Interuniversity Micro-Electronics Center -IMEC-, Louvain:
Ultra clean processing of semiconductor surfaces XI : Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium
Durnten-Zurich: TTP, 2013 (Solid state phenomena 195)
ISBN: 978-3-03-785527-0
pp.305-309
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) <11, 2012, Gent>
English
Conference Paper
Fraunhofer ISE ()

: http://publica.fraunhofer.de/documents/N-241975.html