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Development of near atomically perfect diffraction gratings for EUV and soft X-rays with very high efficiency and resolving power

: Voronov, D.L.; Anderson, E.H.; Cambie, R.; Gawlitza, P.; Goray, L.I.; Gullikson, E.M.; Salmassi, F.; Warwick, T.; Yashchuk, V.V.; Padmore, H.A.


Institute of Physics -IOP-, London:
11th International Conference on Synchrotron Radiation Instrumentation, SRI 2012 : 9 - 13 July 2012, Lyon, France
Bristol: IOP Publishing, 2013 (Journal of physics. Conference series 425.2013, Pt.1-21)
ISSN: 1742-6588
Art. 152006, 5 pp.
International Conference on Synchrotron Radiation Instrumentation (SRI) <11, 2012, Lyon>
Conference Paper, Journal Article
Fraunhofer IWS ()

Multilayer-coated Blazed Gratings (MBG) can offer high diffraction efficiency in a very high diffraction order and are therefore of great interest for high-resolution EUV and soft X-ray spectroscopy techniques such as Resonance Inelastic X-ray Scattering. However, realization of the MBG concept requires nano-scale precision in fabrication of a saw-tooth substrate with atomically smooth facets, and reproduction of the blazed groove profile in the course of conformal growth of a multilayer coating. We report on recent progress achieved in the development, fabrication, and characterization of ultra-dense MBGs for EUV and soft X-rays. As a result of thorough optimization of all steps of the fabrication process, an absolute diffraction efficiency as high as 44% and 12.7% was achieved for a 5250 l/mm grating in the EUV and soft X-ray regions respectively. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft X-ray energy range with revolutionary applications in synchrotron science.