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High speed piezoelectric microscanners with large deflection using mechanical leverage amplification

: Gu-Stoppel, S.; Kaden, D.; Quenzer, H.J.; Hofmann, U.; Benecke, W.

Postprint (PDF; )

Procedia Engineering 47 (2012), pp.56-59
ISSN: 1877-7058
European Conference on Solid-State Transducers (Eurosensors) <26, 2012, Kraków>
Journal Article, Conference Paper, Electronic Publication
Fraunhofer ISIT ()

In this paper design and fabrication of high speed piezoelectric microscanners are presented. These single axis microscanners with 1 mm(2) mirror area feature thin-film PZT (lead-zirconate-titanate) actuators with high piezoelectric coefficients [1] and mechanical leverage amplification to achieve large deflections. A parametric study by means of analytical modeling and FEM simulations has been performed. A SOI wafer consisting of 80 mu m polysilicon and 1 mu m SiO2 on 725 mu m silicon wafer is used as the substrate, whereon a 2 mu m thick PZT layer is deposited by magnetron sputtering applied for the piezoelectric drives. Various micromirrors with resonant frequencies up to 56 kHz and extrapolated theta(opt)center dot D products up to 60 have been designed. Prototypes with these designs have been successfully fabricated in a bulk micromachining process.