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Inline process metrology system for the control of laser surface structuring processes

 
: Schmitt, R.; Mallmann, G.; Winands, K.; Pothen, M.

:
Postprint (PDF; )

Physics procedia 39 (2012), pp.814-822
ISSN: 1875-3892
ISSN: 1875-3884
International Conference on Photonic Technologies <2012, Fürth>
International Conference on Laser Assisted Net Shape Engineering (LANE) <7, 2012, Fürth>
English
Conference Paper, Journal Article, Electronic Publication
Fraunhofer IPT ()

Abstract
Laser surface structuring is a rapidly developing manufacturing technology. This technology offers a high level of flexibility regarding the geometrical design and a wide range of machinable materials. However, current systems used for laser structuring have a crucial deficit. The existing process control systems have no sufficient feedback information of the machined surface topology before, during and after the process, not being able to detect errors / deviations and so to adapt the structuring strategy while processing. Therefore a novel scanner based inline metrology system has been developed to control the laser surface structuring process by a process monitoring software.

: http://publica.fraunhofer.de/documents/N-234533.html