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Melt expulsion by a coaxial gas jet in trepanning of CMSX-4 with microsecond Nd:YAG laser radiation

: Willach, J.; Kreutz, E.W.; Michel, J.; Nießen, M.; Schulz, W.; Poprawe, R.


Miyamoto, I. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; Japan Laser Processing Society -JLPS-:
Fourth International Symposium on Laser Precision Microfabrication : 21 - 24 June 2003, Munich, Germany
Bellingham/Wash.: SPIE, 2003 (SPIE Proceedings Series 5063)
ISBN: 0-8194-4869-9
International Symposium on Laser Precision Microfabrication <4, 2003, München>
Conference Paper
Fraunhofer ILT ()
trepanning; melt expulsion; supersonic gas flow; Euler equations; finite volume method; CMSX-4

Trepanning of 200µm holes in 2-5mm thick CMSX-4 sheets is done by laser radiation provided by a lamp-pumped Nd:YAG slab laser with pulse durations of 100-500µs. Pulse energies <1J determine the material removal mainly by melt expulsion assisted by a processing gas jet coaxial to the laser beam. Stagnation and deflection of the gas jet at the entrance of the kerf, friction in the molten material, and friction at the liquid/solid interface hinder an efficient melt expulsion.
A simulation tool for supersonic gas flow solving Euler equations by the Finite Volume Method is developed in order to investigate the gas flow through the trepanning kerf. Gas pressures above and within the kerfs while trepanning at different inclination angles, geometries and arrangements of nozzles as well nozzle reservoir pressures are presented. The computed gas flow is compared to melt expulsion investigated metallographically by the determination of kerf widths and the thickness of the re-solidified melt.