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Integration of multi-level MOEMS structure on CMOS for spatial light modulators

 
: Friedrichs, Martin; List, Matthias; Müller, Michael

:
Fulltext urn:nbn:de:0011-n-2343121 (2.3 MByte PDF)
MD5 Fingerprint: 864ab699579b60fccd2884e67e49f0e1
Created on: 23.3.2013


Gessner, Thomas (Ed.) ; Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2013. CD-ROM : Amsterdam, The Netherlands, 13 - 14 March 2013, 7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Berlin: VDE-Verlag, 2013
ISBN: 978-3-8007-3490-0
8 pp.
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <7, 2013, Amsterdam>
English
Conference Paper, Electronic Publication
Fraunhofer IPMS ()
MOEMS; sacrificial layer technique; surface micromachining

: http://publica.fraunhofer.de/documents/N-234312.html