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Laser Micromachining for Micro- and Lab-on- Chip-Systems
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2012
Conference Paper
Titel
Laser Micromachining for Micro- and Lab-on- Chip-Systems
Author(s)
Nestler, J.
Enderlein, Tom
Geidel, S.
Hauptwerk
Conference proceedings ILaCoS 2012
Konferenz
International Laser and Coating Symposium (ILaCoS) 2012
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS