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Processes for wafer level integration of carbon nanotubes in electronic and sensor applications
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2012
Conference Paper
Titel
Processes for wafer level integration of carbon nanotubes in electronic and sensor applications
Author(s)
Hermann, Sascha
Fiedler, H.
Loschek, S.
Schulz, Stefan E.
Geßner, Thomas
Hauptwerk
Mikro-System-Technik Chemnitz 2012. Mikromechanik & Mikroelektronik
Konferenz
Chemnitzer Fachtagung Mikromechanik und Mikroelektronik 2012
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS