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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors

 
: Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald

Gessner, T. (Hrsg.) ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2012. CD-ROM : Zurich, Switzerland, 21 - 22 March 2012, 6th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Berlin: VDE-Verlag, 2012
ISBN: 978-3-8007-3423-8
9 pp.
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <6, 2012, Zurich>
European Commission EC
FP7-ICT; 248623; TACO
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-229171.html