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Progress in miniaturization of a MEMS based hybrid-integrated NIR spectrometer
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2012
Conference Paper
Titel
Progress in miniaturization of a MEMS based hybrid-integrated NIR spectrometer
Author(s)
GrĂ¼ger, Heinrich
Fraunhofer-Institut fĂ¼r Photonische Mikrosysteme IPMS
Scholles, Michael
Fraunhofer-Institut fĂ¼r Photonische Mikrosysteme IPMS
Hauptwerk
Sensors Expo & Conference 2012
Konferenz
Sensors Expo & Conference 2012
Language
English
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Fraunhofer-Institut fĂ¼r Photonische Mikrosysteme IPMS