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Algorithmic approaches for system-level simulation of MEMS and aspects of cosimulation

 
: Schneider, Peter; Clauß, Christoph; Donath, Ulrich; Elst, Günter; Enge-Rosenblatt, Olaf; Uhle, Thomas

Bechtold, Tamara (Ed.):
System-level Modeling of MEMS
Weinheim: Wiley-VCH, 2013 (Advanced Micro and Nanosystems 10)
ISBN: 978-3-527-31903-9 (Print)
ISBN: 978-3-527-64712-5 (PDF)
ISBN: 3-527-31903-4
ISBN: 978-3-527-64713-2
pp.95-121
English
Book Article
Fraunhofer IIS, Institutsteil Entwurfsautomatisierung (EAS) ()
microelectromechanical system; MEMS models; system-level simulation; multibody systems; fluidic systems; network; model description languages; mixed-signal simulation; Co-Simulation

: http://publica.fraunhofer.de/documents/N-228124.html