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Boron-interstitial cluster kinetics: Extraction of binding energies from dedicated experiments

Kinetik von Bor-Eingezwischengitteragglomeraten: Ermittlung der Bindungsenergie aus dedizierten Experimenten
: Ortiz, C.J.; Pichler, P.; Haublein, V.; Mannino, G.; Scalese, S.; Privitera, V.; Solmi, S.; Lerch, W.

Pichler, P.; Claverie, A.; Lindsay, R.; Orlowski, M.; Windl, W.:
Silicon Front-End Junction Formation - Physics and Technology : Symposium held April 13 - 15, 2004, San Francisco, California, U.S.A. ; Symposium C, held at the 2004 MRS spring meeting
Warrendale, Pa.: MRS, 2004 (MRS-Proceedings 810)
ISBN: 1-558-99760-1
Materials Research Society (Spring Meeting) <2004, San Francisco/Calif.>
Symposium C "Silicon Front-End Junction Formation - Physics and Technology" <2004, San Francisco/Calif.>
Conference Paper
Fraunhofer IISB ()
Bor; Silicium; Bor-Eingenzwischengitteragglomerat

A description of the transient diffusion and activation of boron during post-implantation annealing steps is one of the most challenging tasks. In industrially relevant situation, it needs to address diffusion at extrinsic concentrations, the agglomeration of self-interstitials, and the formation of boron-interstitial clusters. This article describes the experimental work performed or used to calibrate model parameters as independently as possible. In particular, the experiments used to extract information about the energetics of boron-interstitial clusters are described.