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Wafer level glass molding

: Hünten, M.; Hollstegge, D.; Klocke, F.


Aoyama, T.:
Emerging technology in precision engineering XIV : Selected, peer reviewed papers from the 14th International Conference on Precision Engineering (ICPE 2012), November 8 -10, 2012, Hyogo, Japan
Durnten-Zurich: TTP, 2012 (Key engineering materials 523/524)
ISBN: 978-3-03785-509-6
ISSN: 1013-9826
International Conference on Precision Engineering (ICPE) <14, 2012, Hyogo>
Conference Paper
Fraunhofer IPT ()

Manufacturing of micro optical components is approached with many different technologies. In this paper it is presented how the precision glass molding process is enabled to manufacture micro optical components made out of glass. In comparison to the existing glass molding technology the new approach aims for molding entire glass wafers including multiple micro optical components. It is explained which developments in the filed of simulation, mold manufacturing and molding were accomplished in order to enable the precision glass molding on wafer scale.