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Note: Micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy

 
: Sebastian, A.; Shamsudhin, N.; Rothuizen, H.; Drechsler, U.; Koelmans, W.W.; Bhaskaran, H.; Quenzer, H.J.; Wagner, B.; Despont, M.

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Review of scientific instruments 83 (2012), No.9, Art.096107, 3 pp.
ISSN: 0034-6748
ISSN: 1089-7623
English
Journal Article
Fraunhofer ISIT ()

Abstract
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.

: http://publica.fraunhofer.de/documents/N-223347.html