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Measurement of net dopant concentration via dynamic photoluminescence

: Giesecke, J.A.; Schubert, M.C.; Warta, W.


Journal of applied physics 112 (2012), No.6, Art. 063704, 8 pp.
ISSN: 0021-8979
ISSN: 1089-7550
Journal Article
Fraunhofer ISE ()
Solarzellen - Entwicklung und Charakterisierung; Silicium-Photovoltaik; Charakterisierung von Prozess- und Silicium-Materialien; Messtechnik und Produktionskontrolle; Charakterisierung; Zellen und Module

This paper presents a class of methods to determine net dopant concentration of silicon wafers by means of dynamic or quasi-steady-state photoluminescence. In contrast to resistivity measurements, this approach is independent of assumptions about dopant type and majority carrier mobility. The latter fact makes it particularly interesting for the determination of net dopant concentration in compensated silicon, where conventional mobility models involving only one dopant species have been reported to fail. Our approach also allows access to majority carrier mobility via combination of net dopant concentration as inferred from photoluminescence with a resistivity measurement.