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Large area PECVD process using dual rotatable magnetrons

: Fahland, M.; Neidhardt, J.; Thielsch, R.; Wahl, A.; Kleinhempel, R.; Blüthner, R.; Preussner, T.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 55th Annual SVC Technical Conference 2012 : April 28-May 3, 2012; Santa Clara, Calif.; Proceedings
Albuquerque: SVC, 2012
ISBN: 978-1-878068-32-3
ISBN: 1-878068-32-6
Society of Vacuum Coaters (Annual Technical Conference) <55, 2012, Santa Clara/Calif.>
Conference Paper
Fraunhofer FEP ()

Magnetron PECVD is an emerging technology targeting the possibility to perform a chemical vapor deposition process at fairly high rates over large areas. The paper presents a new setup based on rotatable magnetrons. The precursor hexamethydisiloxane was used to deposit SiOxCy layers on polymer substrates. It could be shown that the formation of redeposition zones on the target can be avoided completely. The discharge voltage drift as it is typical for planar configuration is damped. These advantages could be optained on expense of deposition rate. The maximum achieved value was 180 nm*m/min which is higher than sputtering but lower compared to planar magnetron based PECVD. It could be demonstrated that the technology is stable over several hours deposition time. The optical properties of the layers are well suited for the usage as low refractive index materials in optical layer stacks. All experiments have been carried out on a pilot coater of 600 mm deposition width. Scale-up experiments to 2100 mm targets in a production coater have been done.