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Influence of different treatment techniques on the barrier properties of MOCVD TiN against copper diffusion
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2001
Conference Paper
Titel
Influence of different treatment techniques on the barrier properties of MOCVD TiN against copper diffusion
Author(s)
Riedel, S.
Schulz, S.E.
Baumann, J.
Rennau, M.
Gessner, T.
Hauptwerk
Materials for advanced metallization
Konferenz
European Workshop on Materials for Advanced Metallization (MAM) 2000
DOI
10.1016/S0167-9317(00)00450-0
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM