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2011
Conference Paper
Titel
Progress in Laser Chemical Processing for Silicon Solar Cells
Abstract
An overview of the selected current research focuses of Laser Chemical Processing (LCP) technology at Fraunhofer ISE is given. The efforts to support the industrialization phase of the LCP technology include: (i) the processing of large-area solar cells, (ii) improving the uniformity of the laser doping, (iii) reducing the process cost by applying low-cost doping mediums and by eliminating the need of neutralization of the waste chemicals, and (iv) developing a LCP boron doping process, which is very attractive for the formation of the local back surface field for the p-type cells and for the formation of selective emitter for n-type solar cells.
Author(s)