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Systematic study of the influence of the Czochralski hot zone design on the point defect distribution with respect to a perfect crystal
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2002
Conference Paper
Titel
Systematic study of the influence of the Czochralski hot zone design on the point defect distribution with respect to a perfect crystal
Author(s)
Krause, M.
Friedrich, J.
Müller, G.
Hauptwerk
European Materials Research Society 2002 Spring Meeting, Symposium O: The 300 mm Silicon Era: Material, Equipment, Technology. Papers
Konferenz
Symposium O "The 300 mm Silicon Era: Material, Equipment, Technology" 2002
European Materials Research Society (Spring Meeting) 2002
DOI
10.1016/S1369-8001(02)00120-8
Language
English
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