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Systematic study of the influence of the Czochralski hot zone design on the point defect distribution with respect to a perfect crystal

: Krause, M.; Friedrich, J.; Müller, G.


Richter, H. ; European Materials Research Society -EMRS-:
European Materials Research Society 2002 Spring Meeting, Symposium O: The 300 mm Silicon Era: Material, Equipment, Technology. Papers : 18 - 21 June, 2002, Strasbourg, France
Oxford: Pergamon, 2002 (Materials science in semiconductor processing 5.2002,Nr.4/5)
Symposium O "The 300 mm Silicon Era: Material, Equipment, Technology" <2002, Strasbourg>
European Materials Research Society (Spring Meeting) <2002, Strasbourg>
Conference Paper, Journal Article
Fraunhofer IIS B ( IISB) ()