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Ion projection lithography for nano-patterning
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2000
Conference Paper
Titel
Ion projection lithography for nano-patterning
Author(s)
Heuberger, A.
BrĂ¼nger, W.
Hauptwerk
Materials issues and modeling for device nanofabrication
Konferenz
Symposium J: "Advanced Materials and Techniques for Nanolithography" 1999
Symposium N: "Atomic Scale Measurements and Atomistic Models of Epitaxial Growth and Lithography" 1999
Materials Research Society (Fall Meeting) 1999
Language
English
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Fraunhofer-Institut fĂ¼r Siliziumtechnologie ISIT