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A new way to silicon microstructuring with electrochemical etching
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2000
Journal Article
Title
A new way to silicon microstructuring with electrochemical etching
Author(s)
Christophersen, M.
Merz, P.
Quenzer, J.
Carstensen, J.
Föll, H.
Journal
Physica status solidi. A
DOI
10.1002/1521-396X(200011)182:1<561::AID-PSSA561>3.0.CO;2-S
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Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
