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Investigations on piezoelectric behaviour of aluminium nitride thin films for high frequency smart ultrasonic sensors systems
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2011
Conference Paper
Titel
Investigations on piezoelectric behaviour of aluminium nitride thin films for high frequency smart ultrasonic sensors systems
Author(s)
Herzog, T.
Walter, S.
Heuer, H.
Hauptwerk
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011
Language
English
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