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In-line thin film characterization using eddy current techniques

 
: Hillmann, S.; Klein, M.; Heuer, H.

:

Chady, Tomasz (Ed.):
Electromagnetic nondestructive evaluation XIV : Selected papers from the Fifteenth International Workshop on Electromagnetic Nondestructive Evaluation, which was held in Szczecin, Poland, from June 13 - 16, 2010
Amsterdam: IOS Press, 2011 (Studies in Applied Electromagnetics and Mechanics 35)
ISBN: 978-1-60750-749-9
ISBN: 978-1-60750-750-5
pp.330-338
International Workshop on Electromagnetic Nondestructive Evaluation (ENDE) <15, 2010, Szczecin>
English
Conference Paper
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()

: http://publica.fraunhofer.de/documents/N-219885.html