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Light scattering-based measurement of relevant surface roughness

 
: Schröder, Sven; Trost, Marcus; Coriand, Luisa; Duparré, Angela

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Fulltext ()

OSA technical digest. Online resource (2012), OTu1D.2
http://www.opticsinfobase.org/
Conference "Optical Fabrication and Testing" (OFT) <2012, Monterey/Calif.>
English
Conference Paper, Electronic Publication
Fraunhofer IOF ()

Abstract
Light scattering measurements are used to determine surface PSD functions and application-specific roughness values in different relevant spatial frequency ranges. A new method is presented for area covering investigations of the high-spatial frequency roughness.

: http://publica.fraunhofer.de/documents/N-219403.html