Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Fine scale piezoelectric 1-3 composites: A new approach of cost effective fabrication

: Starke, S.; Schönecker, A.; Gebhardt, W.


Colla, E. ; Institute of Electrical and Electronics Engineers -IEEE-:
11th IEEE International Symposium on Applications of Ferroelectrics 1998. Proceedings : Montreux, Switzerland, August 24 - 27, 1998
Piscataway, NJ: IEEE, 1999
ISBN: 0-7803-4959-8
ISBN: 0-7803-4960-1
ISBN: 0-7803-4961-X
International Symposium on Applications of Ferroelectrics <11, 1998, Montreux>
Conference Paper
Fraunhofer IKTS ()

A new method of fabricating 1-3 composites for transducer applications at frequencies 5 MHz has been developed. This method uses a master mold which has been structured by microsystems technologies such as micromachining, chemical or plasma etching. From this mold templates of a soft polymer have been taken. They were infiltrated with a ceramic slip. After drying the ceramic green body could be demolded without loss of the transfer mold. The process steps of this so called "soft mold" method are described. First results on 1-3 composites with square rods of 85 µm and 145 µm edge length are reported. The composites showed high coupling coefficients kt, of 0.71 and 0.79, respectively