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2004
Conference Paper
Titel
Analogue components for a mixed signal driver ASIC for resonant micro-mirror control
Abstract
This paper describes the analogue components of the Driver - ASIC for synchronized excitation of electrostatically driven resonant micro scanning mirrors which have been developed and fabricated at the Fraunhofer IPMS for several years. Its principal purpose is synchronized excitation and control of resonant Micro - Mirrors.