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Back-end-of the line compatible homogeneous coating of vertical aligned carbon nanotubes with a conductive diffusion barrier for interconnect applications

: Fiedler, H.; Ecke, R.; Hermann, S.; Schulz, S.E.; Gessner, T.

3rd International Conference on Nanotechnology: Fundamentals and Applications, ICNFA 2012. Proceedings. CD-ROM
Ottawa: Avestia Publishing, 2012
ISBN: 978-0-9867183-3-5
International Conference on Nanotechnology - Fundamentals and Applications (ICNFA) <3, 2012, Montreal>
Conference Paper
Fraunhofer ENAS ()